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Specification of Wet Chemical Processing Station 1.? ?? ???In – Organic Wet Chemical Station ( Quantity 01 ) 1.1? ?? ???General Specifications : 1.1.1? ?? ???Overall dimension : 1800 mm (L) x 800 mm (D) x 1700 mm (H) ± 100 mm. 1.1.2? ?? ?? ?Suitable for Inorganic Chemicals like HF, HCL,H2O2, H2SO4, NH4OH, KOH, TMAH, HNO3 ( vendor to specify ). 1.1.3? ?? ?? ?Full seamed welded min 12 mm thick White Polypropylene housing with Teflon perforated work top, ISO Certified Housing. 1.1.4? ?? ?? ?Min 5 ~ 6 thick Clear Lexan vertical sliding / flapping sash panels. 1.1.5? ?? ???Slopped plenum bottom for complete drainage 1.1.6? ?? ?? ?Bypass opening top and bottom sliding doors for reducing chemical vapour concentration. 1.1.7? ?? ???Wet Station with Acid Fume Resistant coated exhaust system with exhaust capacity 1100 CFM. 1.2? ?? ???Features : 1.2.1? ?? ???One inbuilt “ Quartz with Teflon / PTFE isostatically moulded ” acid bath ( for Fuming HNO3 ) with heater, temperature control and cover.??The bath should accommodate 6” Wafer cassette ( typical ) dimension 200 mm (L) x 200 mm (W) x 250 mm (D) upto 200°C. 1.2.2? ?? ?? ?One inbuilt Teflon / PTFE acid bath with cover, without heater facility.??Typical dimension 200 mm (L) x 200 mm (W) x 175 – 230 mm (D). 1.2.3? ?? ?? ?PVC adjustable leg levelers with lock and PU Wheels. 1.2.4? ?? ?? ?Sealed light fixture with light source for proper illumination at deck level. 1.2.5? ?? ???Exhausted lower compartment for chemical storage i.e. beneath deck, including PP silding door. 1.2.6? ?? ?? ?Class 1000 clean room compatible. 1.2.7? ?? ???Suitable exhaust meter should be provided. 1.3? ?? ???Power & Utilities : 1.3.1? ?? ???Electrical utility : 220V AC, ± 5%, 50 Hz, Single phase with EMO switch cut-off all electrical power to chemical station. 1.3.2? ?? ?? ?Three electrical sockets ( 5 Amps / 16 Amps ) 1 Switch for fluorescent light has to be provided ( Compatible for Indian Standard Electrical Connection ). 1.4? ?? ???Utility Sink : 1.4.1? ?? ???One perforated cover sink of size 440 mm (L) x 320 mm ( W ) x 250 mm (D ) ± 50 mm at the extreme right or left side of work deck PVDF / Teflon to work surface. 1.4.2? ?? ?? ?Proper acid drainage system for the Wet Bench ( Vendor to Specify ). 1.4.3? ?? ?? ?PVC gooseneck x 2 Nos. – mounted adjacent to basin, Tap and RO Water. 1.4.4? ?? ?? ?PFA Spray Gun x 1 No. – hook on the side wall ( basin ) DI Water 1.4.5? ?? ?? ?PFA Spray Gun x 1 No. – hook on the side wall ( basin ) – N2
2013-11-29 637阅读
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潮湿化学处理站规格说明

1. 无机潮湿化学站(数量1)

1.1 总体规格:
1.1.1 整体尺寸:1800毫米(长)x 800毫米(深)x 1700毫米(高)± 100毫米。
1.1.2 适用于无机化学品,如氢氟酸,盐酸,过氧化氢,硫酸,氨水,氢氧化钾,TMAH,硝酸(供应商需指定)。
1.1.3 全焊缝焊接最小12毫米厚的白色聚丙烯外壳,带有聚四氟乙烯穿孔台面,具有ISO认证外壳。
1.1.4 最少5-6毫米厚的清晰Lexan垂直滑动/翻盖落扇板。
1.1.5 坡度底座,确保完全排水。
1.1.6 顶部和底部滑动门,以减少化学气体浓度。
1.1.7 带有酸烟抗性涂层排气系统的湿处理站,排气量为1100 CFM。

1.2 特点:
1.2.1 内置的“石英与聚四氟乙烯/PTFE等静压成型”酸槽(用于烟雾状硝酸),带有加热器,温度控制和盖子。槽可容纳6英寸晶片盒(典型尺寸),尺寸为200毫米(长)x 200毫米(宽)x 250毫米(深),最高200°C。
1.2.2 内置的聚四氟乙烯/PTFE酸槽,带盖子,无加热设施。典型尺寸为200毫米(长)x 200毫米(宽)x 175-230毫米(深)。
1.2.3 PVC可调腿支架,带锁和PU轮。
1.2.4 密封的照明装置,为甲板水平面提供适当的照明。
1.2.5 排气下置储物柜,即甲板下方,包括PP滑动门。
1.2.6 适用于1000级洁净室。
1.2.7 应提供适当的排气计。

1.3 电力和公用事业:
1.3.1 电力供应:220V AC,± 5%,50 Hz,单相,带有EMO开关断开化学站的所有电力供应。
1.3.2 应提供三个电源插座(5安培/16安
2023-06-24
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  • Beth
    Specification of Wet Chemical Processing Station
    湿化学站规格书

    1.        In – Organic Wet Chemical Station ( Quantity 01 )
    在有机湿化学站(数量01)

    1.1        General Specifications :通用规格
    1.1.1        Overall dimension : 1800 mm (L) x 800 mm (D) x 1700 mm (H) ± 100 mm.
    总体尺寸
    1.1.2         Suitable for Inorganic Chemicals like HF, HCL,H2O2, H2SO4, NH4OH, KOH, TMAH, HNO3 ( vendor to specify ).适合无机化学物如:HF, HCL,H2O2, H2SO4, NH4OH, KOH, TMAH, HNO3(由商指定)
    1.1.3         Full seamed welded min 12 mm thick Wh
    2013-12-04
  • deni.silalahi
    1.2.7        Suitable exhaust meter should be provided.应合适的排气计。
    建议借助相关软件
    2013-12-04
  • janet7
    坐等楼主被拍。
    2013-12-01
  • 毕崇明
    1.1.1        Overall dimension : 1800 mm (L) x 800 mm (D) x 1700 mm (H) ± 100 mm.
    外形尺寸:1800 mm (L) x 800 mm (D) x 1700 mm (H) ± 100 mm.
    哈哈哈,这句最简单了。
    2013-12-01
  • Julia5
    oh,my goddd
    2013-11-30
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